| 黄跃宇.电沉积镍薄膜早期形核生长的计算机模拟[J].南华大学学报(自然科学版),2015,29(2):91~96.[HUANG Yue-yu.The Computer Simulation of Early Nucleation andGrowth of Electrodeposited Ni Thin Films[J].Journal of University of South China(Science and Technology),2015,29(2):91~96.] |
| 电沉积镍薄膜早期形核生长的计算机模拟 |
| The Computer Simulation of Early Nucleation andGrowth of Electrodeposited Ni Thin Films |
| 投稿时间：2014-10-10 |
| DOI： |
| 中文关键词: 电沉积镍薄膜 动力学蒙特卡罗 岛密度 岛尺寸 分形维数 |
| 英文关键词:electrodeposited Ni thin film the kinetic Monte Carlo island density island size fractal dimension |
| 基金项目:衡阳科技局基金资助项目(2012KJ23);南华大学博士基金资助项目(2011XQD25) |
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| 中文摘要: |
| 介绍了动力学蒙特卡罗方法模拟薄膜生长的基本理论,对电沉积镍薄膜早期形核生长进行了模拟,发现镍薄膜的亚单层生长可以分为四个阶段,随着基底温度的上升,岛的密度减少,岛的尺寸增大,岛的分形维数增大；随着沉积率的上升,岛的密度上升,岛的尺寸减小,岛的分形维数减小；随着覆盖率的增加,岛的尺寸增大,分形维数不变. |
| 英文摘要: |
| The paper introduces the theory that simulates thin film growth with the kinetic Monte Carlo method.The simulations of submonolayer growth of electrodeposited Ni thin films with KMC method discover that there are four growth rules.Firstly,the growth of submonolayer can be carried out in four stages according to island distribution.Secondly,when substructure temperature increases,the island density decreases,the island size increases and the fractal dimension enlarges.Thirdly,when deposition rate raises,the island density increases,the island size decreases and the fractal dimension reduces.Fourthly,when coverage increases,the island size increases and the fractal dimension is constant. |
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