徐祖华,王彦,雷运喜,朱慧玲.用PLC实现的磁溅式三靶真空镀膜机控制系统[J].南华大学学报(自然科学版),2003,(3):59~61.[.The Control System of a Magnetic Scattering Vacuum Three-target Film Coating Machine Realized by PLC[J].Journal of University of South China(Science and Technology),2003,(3):59~61.] |
用PLC实现的磁溅式三靶真空镀膜机控制系统 |
The Control System of a Magnetic Scattering Vacuum Three-target Film Coating Machine Realized by PLC |
修订日期:2003-03-31 |
DOI: |
中文关键词: PLC,硬件结构,软件结构,电流闭环控制 |
英文关键词:PLC,hardware structure,software structure,current close-circuit control, |
基金项目: |
徐祖华 王彦 雷运喜 朱慧玲 |
南华大学电气工程学院,南华大学电气工程学院,南华大学电气工程学院,南华大学电气工程学院 湖南 衡阳 421001,湖南 衡阳 421001,湖南 衡阳 421001,湖南 衡阳 421001 |
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中文摘要: |
设计的磁溅式三靶真空镀膜机控制系统,采用三菱PLC和EasyView触摸屏,具有参数设置、工艺流程控制、故障报警、保护等功能.文中介绍了PLC控制系统硬件与软件结构,以及对靶单元实现闭环控制,获得稳定靶电流情况. |
英文摘要: |
With Mitsubishi PLC and Easy View touch screen , the control system of magnetic scattering vacuum three-target film coating machine can set parameters, control process-flow, give alarm and protection in case break-down occurs. This paper introduces the software and the hardware structures of the PLCcontrol system as well as the close-circuit control of the target unit, which aims at stabilizing target current. |
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